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[PDF] CVD of Nonmetals

ISBN: 3527292950

Category: Tutorial


Posted on 2017-10-04, by luongquocchinh.

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Author: William S. Rees Jr. | Publisher: Wiley-VCH | Category: Chemistry | Language: English | Page: 441 | ISBN: 3527292950 | ISBN13: 9783527292950 |

Description: Written by leading experts in the field, this practical reference handbook offers an up-to-date, critical survey of the chemical vapor deposition (CVD) of nonmetals, a key technology in semiconductor electronics, finishing, and corrosion protection.

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